TY  - BOOK
AU  - Dobisz, Elizabeth, ed.
TI  - Emerging Lithographic Technologies IV
T2  - Proceedings of SPIE; V. 3997
SN  - 9780819436153 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3997
ER  -