00504nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245005100119260003200170300002000202490003300222856010300255IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819436153 (Print)  cIIA Library  aDobisz, Elizabeth, ed. 0aEmerging Lithographic Technologies IVh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 3997  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3997yClick Here to Access eBook