TY  - BOOK
AU  - Vladimirsky, Yuli, ed.
TI  - Emerging Lithographic Technologies II
T2  - Proceedings of SPIE; V. 3331
SN  - 9780819427762 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3331
ER  -