TY  - BOOK
AU  - Seeger, David, ed.
TI  - Emerging Lithographic Technologies
T2  - Proceedings of SPIE; V. 3048
SN  - 9780819424624 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3048
ER  -