TY  - BOOK
AU  - Bergmann, Neil, ed.
TI  - Electronics and Structures for MEMS
T2  - Proceedings of SPIE; V. 3891
SN  - 9780819434920 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3891
ER  -