@book{24972,
	author = {Bergmann, Neil, ed.},
	title = {Electronics and Structures for MEMS},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3891},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3891}
}