00553nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245010100118260003200219300002000251490003300271856010300304IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819417855 (Print)  cIIA Library  aWarlaumont, John, ed. 0aElectron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing Vh[eBook]  aWashington, USAbSPIEc1995  aOnline resource  aProceedings of SPIE; V. 2437  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2437yClick Here to Access eBook