@book{24962,
	author = {Warlaumont, John, ed.},
	title = {Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2437},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2437}
}