Yanof, Arnold, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII  [eBook] 

 - Washington, USA  SPIE  1989 
 - Online resource 
 - Proceedings of SPIE; V. 1089 .
<br/><br/><label>ISBN: </label>9780819401243 (Print)