00766nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002600092245009100118260003200209300002000241490003300261856010300294942000700397999001700404952016300421IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819403100 (Print)  cIIA Library  aResnick, Douglas, ed. 0aElectron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IXh[eBook]  aWashington, USAbSPIEc1990  aOnline resource  aProceedings of SPIE; V. 1263  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1263yClick Here to Access eBook  cEB  c24960d24960  00104070aBANbBANd2011-07-01eSPIEhV. 1263l0pEB4420r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1263w2021-11-05yEB