Resnick, Douglas, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX  [eBook] 

 - Washington, USA  SPIE  1990 
 - Online resource 
 - Proceedings of SPIE; V. 1263 .
<br/><br/><label>ISBN: </label>9780819403100 (Print)