00772nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245009300123260003200216300002000248490003300268856010300301942000700404999001700411952016200428IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892526673 (Print)  cIIA Library  aBlais, Phillip, ed.943136 0aElectron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies Vh[eBook]  aWashington, USAbSPIEc1986  aOnline resource  aProceedings of SPIE; V. 0632  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0632yClick Here to Access eBook  cEB  c24959d24959  00104070aBANbBANd2011-07-01eSPIEhV. 632l0pEB4419r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0632w2021-11-05yEB