TY  - BOOK
AU  - Blais, Phillip, ed.
TI  - Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V
T2  - Proceedings of SPIE; V. 0632
SN  - 9780892526673 (Print)
PY  - 1986///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0632
ER  -