Blais, Phillip, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V  [eBook] 

 - Washington, USA  SPIE  1986 
 - Online resource 
 - Proceedings of SPIE; V. 0632 .
<br/><br/><label>ISBN: </label>9780892526673 (Print)