@book{24959,
	author = {Blais, Phillip, ed.},
	title = {Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V},
	publisher = {SPIE},
	year = {1986},
	series = {Proceedings of SPIE; V. 0632},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0632}
}