00773nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245009400123260003200217300002000249490003300269856010300302942000700405999001700412952016200429IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525720 (Print)  cIIA Library  aBlais, Phillip, ed.943135 0aElectron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IVh[eBook]  aWashington, USAbSPIEc1985  aOnline resource  aProceedings of SPIE; V. 0537  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0537yClick Here to Access eBook  cEB  c24958d24958  00104070aBANbBANd2011-07-01eSPIEhV. 537l0pEB4418r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0537w2021-11-05yEB