00544nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245009400116260003200210300002000242490003300262856010300295IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525720 (Print)  cIIA Library  aBlais, Phillip, ed. 0aElectron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IVh[eBook]  aWashington, USAbSPIEc1985  aOnline resource  aProceedings of SPIE; V. 0537  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0537yClick Here to Access eBook