TY  - BOOK
AU  - Wagner, Alfred, ed.
TI  - Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III
T2  - Proceedings of SPIE; V. 0471
SN  - 9780892525065 (Print)
PY  - 1984///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0471
ER  -