00545nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245009500116260003200211300002000243490003300263856010300296IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525065 (Print)  cIIA Library  aWagner, Alfred, ed. 0aElectron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IIIh[eBook]  aWashington, USAbSPIEc1984  aOnline resource  aProceedings of SPIE; V. 0471  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0471yClick Here to Access eBook