Wagner, Alfred, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III  [eBook] 

 - Washington, USA  SPIE  1984 
 - Online resource 
 - Proceedings of SPIE; V. 0471 .
<br/><br/><label>ISBN: </label>9780892525065 (Print)