00549nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245009700118260003200215300002000247490003300267856010300300IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819414892 (Print)  cIIA Library  aPatterson, David, ed. 0aElectron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IVh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 2194  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2194yClick Here to Access eBook