Patterson, David, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III  [eBook] 

 - Washington, USA  SPIE  1993 
 - Online resource 
 - Proceedings of SPIE; V. 1924 .
<br/><br/><label>ISBN: </label>9780819411587 (Print)