@book{24955,
	author = {Patterson, David, ed.},
	title = {Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1924},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1924}
}