00549nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245009700118260003200215300002000247490003300267856010300300IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819408266 (Print)  cIIA Library  aPeckerar, Martin, ed. 0aElectron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IIh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1671  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1671yClick Here to Access eBook