TY  - BOOK
AU  - Peckerar, Martin, ed.
TI  - Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing
T2  - Proceedings of SPIE; V. 1465
SN  - 9780819405647 (Print)
PY  - 1991///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1465
ER  -