Peckerar, Martin, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing  [eBook] 

 - Washington, USA  SPIE  1991 
 - Online resource 
 - Proceedings of SPIE; V. 1465 .
<br/><br/><label>ISBN: </label>9780819405647 (Print)