00744nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245006500123260003200188300002000220490003300240856010300273942000700376999001700383952016200400IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528080 (Print)  cIIA Library  aBlais, Phillip, ed.943129 0aElectron-Beam, X-Ray, and Ion-Beam Lithographies VIh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0773  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0773yClick Here to Access eBook  cEB  c24952d24952  00104070aBANbBANd2011-07-01eSPIEhV. 773l0pEB4412r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0773w2021-11-05yEB