TY  - BOOK
AU  - Yanof, Arnold, ed.
TI  - Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII
T2  - Proceedings of SPIE; V. 0923
SN  - 9780892529582 (Print)
PY  - 1988///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0923
ER  -