00541nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245009200115260003200207300002000239490003300259856010300292IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892529582 (Print)  cIIA Library  aYanof, Arnold, ed. 0aElectron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VIIh[eBook]  aWashington, USAbSPIEc1988  aOnline resource  aProceedings of SPIE; V. 0923  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0923yClick Here to Access eBook