Yanof, Arnold, ed. <br/><br/>
Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII  [eBook] 

 - Washington, USA  SPIE  1988 
 - Online resource 
 - Proceedings of SPIE; V. 0923 .
<br/><br/><label>ISBN: </label>9780892529582 (Print)