@book{24951,
	author = {Yanof, Arnold, ed.},
	title = {Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII},
	publisher = {SPIE},
	year = {1988},
	series = {Proceedings of SPIE; V. 0923},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0923}
}