00768nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245008900123260003200212300002000244490003300264856010300297942000700400999001700407952016200424IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892524280 (Print)  cIIA Library  aBlais, Phillip, ed.943127 0aElectron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies IIh[eBook]  aWashington, USAbSPIEc1983  aOnline resource  aProceedings of SPIE; V. 0393  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0393yClick Here to Access eBook  cEB  c24950d24950  00104070aBANbBANd2011-07-01eSPIEhV. 393l0pEB4410r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0393w2021-11-05yEB