TY  - BOOK
AU  - Blais, Phillip, ed.
TI  - Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II
T2  - Proceedings of SPIE; V. 0393
SN  - 9780892524280 (Print)
PY  - 1983///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0393
ER  -