Blais, Phillip, ed. <br/><br/>
Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II  [eBook] 

 - Washington, USA  SPIE  1983 
 - Online resource 
 - Proceedings of SPIE; V. 0393 .
<br/><br/><label>ISBN: </label>9780892524280 (Print)