00510nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245006300113260003200176300002000208490003300228856010300261IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819418814 (Print)  cIIA Library  aMunro, Eric, ed. 0aElectron-Beam Sources and Charged-Particle Opticsh[eBook]  aWashington, USAbSPIEc1995  aOnline resource  aProceedings of SPIE; V. 2522  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2522yClick Here to Access eBook