00544nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002800119245004900147260003200196300002000228490003400248856010400282IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510608436 (Print)  a9781510608443 (Online)  cIIA Library  aSwatowska, Barbara, ed. 0aElectron Technology Conference 2016h[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10175  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10175yClick Here to Access eBook