@book{24946,
	author = {Swatowska, Barbara, ed.},
	title = {Electron Technology Conference 2016},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10175},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10175}
}