TY - BOOK AU - SzczepaƄski, Pawel, ed. TI - Electron Technology Conference 2013 T2 - Proceedings of SPIE; V. 8902 SN - 9780819495211 (Print) PY - 2013/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8902 ER -