00505nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245004900122260003200171300002000203490003300223856010300256IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819495211 (Print)  cIIA Library  aSzczepański, Pawel, ed. 0aElectron Technology Conference 2013h[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8902  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8902yClick Here to Access eBook