@book{24945,
	author = {Szczepański, Pawel, ed.},
	title = {Electron Technology Conference 2013},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8902},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8902}
}