@book{24826,
	author = {Ranadive, Deepak, ed.},
	title = {Dry Etch Technology},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1593},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1593}
}