TY  - BOOK
AU  - Harding, Kevin G., ed.
TI  - Dimensional Optical Metrology and Inspection for Practical Applications VIII
T2  - Proceedings of SPIE; V. 10991
SN  - 9781510626478 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10991
ER  -