00584nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002700119245009000146260003200236300002000268490003400288856010400322IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510626478 (Print)  a9781510626485 (Online)  cIIA Library  aHarding, Kevin G., ed. 0aDimensional Optical Metrology and Inspection for Practical Applications VIIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10991  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10991yClick Here to Access eBook