00580nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002400119245008900143260003200232300002000264490003400284856010400318IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510618459 (Print)  a9781510618466 (Online)  cIIA Library  aHarding, Kevin, ed. 0aDimensional Optical Metrology and Inspection for Practical Applications VIIh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10667  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10667yClick Here to Access eBook