00537nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245008700116260003200203300002000235490003300255856010300288IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510601093 (Print)  cIIA Library  aHarding, Kevin, ed. 0aDimensional Optical Metrology and Inspection for Practical Applications Vh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9868  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9868yClick Here to Access eBook