@book{24757,
	author = {Harding, Kevin, ed.},
	title = {Dimensional Optical Metrology and Inspection for Practical Applications V},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9868},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9868}
}