Harding, Kevin, ed. <br/><br/>
Dimensional Optical Metrology and Inspection for Practical Applications IX  [eBook] 

 - Washington, USA  SPIE  2020 
 - Online resource 
 - Proceedings of SPIE; V. 11397 .
<br/><br/><label>ISBN: </label>9781510635715 (Print) 9781510635722 (Online)