@book{24756,
	author = {Harding, Kevin, ed.},
	title = {Dimensional Optical Metrology and Inspection for Practical Applications IX},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11397},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11397}
}