TY  - BOOK
AU  - Harding, Kevin, ed.
TI  - Dimensional Optical Metrology and Inspection for Practical Applications III
T2  - Proceedings of SPIE; V. 9110
SN  - 9781628410471 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9110
ER  -