00539nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245008900116260003200205300002000237490003300257856010300290IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628410471 (Print)  cIIA Library  aHarding, Kevin, ed. 0aDimensional Optical Metrology and Inspection for Practical Applications IIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9110  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9110yClick Here to Access eBook